Wafer cleaning and rinsing (wet table system)

Flow flash point solvent and acid heating

Use with one way or recirculation system

Similar to the use of PFA tubular heaters, but with higher temperature limits

A process involving explosive vapors

Accurate temperature control is critical to the situation

Features and advantages:

The flow path has no contact with the heating element

Allow safe heating of low flash point solvent

The heating medium is isolated in a seamless 316 stainless steel tube

The solvent tube is passivated and electrically polished to ensure purity

The self-discharge flow pipe eliminates residual debris

Cooling tubes quickly reduce the heat below the flash point

NEMA 7 explosion-proof electrical housing

Equipped with rugged sensor and switch array